Spray tools can be utilized for wide range of surface preparation processes, both in front-end-of-line (FEOL) and back-end-of-line (BEOL) applications to fabricate MEMS sensors and actuators, LEDs, power and RF ICs. To perform wet etching, critical cleaning, resist tripping and polymer removal with outstanding uniformity and yield, RENA offers both spray acid tools (SAT) and spray solvent tools (SST). RENA also offers to remanufacture and upgrade customers Semitools batch sprays to improve the process control and yield and to extend the tool life.