Metal Lift-Off with ISODry™
ISODry™ Technology:
Features and Benefits:
- Lowers cost for integrated dry
- Maintains POR for users with Single wafer IPA drying
- Wafer lifter ensures minimal contact area
- Integrated hot N2 produced by heat exchanger for lower energy cost
- Continuous IPA Recirculation
- Reduced IPA usage compared to other typical Vapor or vacuum dryers
- Lower Exhaust Requirements
- IPA use per wafer is similar to other Marangoni dryers
- Advanced software control capabilities with IDX Flexware
- Particle performance < 20 at 150 nm
- With 0.05 Teflon In-Line filtration
- Averaging 15 @ 150 nm
- Cleanroom air quality dependent
- Process Time 7-10 Min (cassette dependent
Contact our Experts
We are happy to help our customers find efficient and process-optimized solutions for their wet processing applications.